The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
Erscheinungsdatum: 13.09.2013

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S.G.K Ananthasuresh; SpringerLink (Online service)

S. G. K. Ananthasuresh

Springer London, Limited

Springer Nature

COPYRIGHT

Kluwer international series in microsystems, Boston, MA, 2003

Softcover reprint of the original 1st ed. 2003, 2013

Microsystems, 1st ed. 2003, New York, NY, 2003

United States, United States of America

Springer Nature, New York, NY, 2012

1, 20121206

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This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically

Front Matter....Pages i-xiii
Introduction....Pages 1-12
Synthesis for Mechanical Behavior....Pages 13-42
Synthesis of Electro-Statically Actuated MEMS....Pages 43-77
Synthesis Methods for Electro-Thermal Actuation....Pages 79-119
Synthesis with Piezoelectric Actuation....Pages 121-153
Synthesis of Piezocomposites....Pages 155-191
Synthesis of Periodic Micro Mechanisms....Pages 193-221
Process Synthesis....Pages 223-265
Mask Synthesis....Pages 267-295
System-Level Synthesis....Pages 297-316
Back Matter....Pages 317-320

2013-08-01