Piezoresistor Design and Applications (Microsystems and Nanosystems Book 1) 🔍
Joseph C. Doll, Beth L. Pruitt (auth.) Springer-Verlag New York, Microsystems and nanosystems, 1st ed. 2013, New York, NY, 2013
英语 [en] · PDF · 5.7MB · 2013 · 📘 非小说类图书 · 🚀/lgli/lgrs/nexusstc/scihub/zlib · Save
描述
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.  Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The  text concludes with an up-to-date discussion of the need for integrated MEMS  design and opportunities to leverage new materials, processes and MEMS technology.  Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
备用文件名
lgli/10.1007%2F978-1-4614-8517-9.pdf
备用文件名
lgrsnf/10.1007%2F978-1-4614-8517-9.pdf
备用文件名
scihub/10.1007/978-1-4614-8517-9.pdf
备用文件名
zlib/Engineering/Joseph C. Doll, Beth L. Pruitt (auth.)/Piezoresistor Design and Applications_2207724.pdf
备选作者
Doll, Joseph C., Pruitt, Beth L.
备用出版商
Springer New York, Imprint Springer
备用出版商
Springer London, Limited
备用出版商
Springer US
备用版本
Microsystems and Nanosystems (Springer (Firm)), New York, ©2013
备用版本
United States, United States of America
备用版本
Microsystems and Nanosystems, uuuu
备用版本
Oct 23, 2013
元数据中的注释
sm22683280
元数据中的注释
{"edition":"1","isbns":["1461485169","1461485177","9781461485162","9781461485179"],"last_page":245,"publisher":"Springer","series":"Microsystems and Nanosystems 1"}
元数据中的注释
Source title: Piezoresistor Design and Applications (Microsystems and Nanosystems)
备用描述
This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators. This book also: · Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design · Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques · Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques · Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction) Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers
备用描述
Front Matter....Pages i-xi
Introduction....Pages 1-20
Piezoresistance Fundamentals....Pages 21-49
Sensitivity, Noise and Resolution....Pages 51-83
Fabrication and Process Modeling....Pages 85-125
Temperature Effects....Pages 127-148
Design Optimization....Pages 149-169
Alternative Materials and Transduction Methods....Pages 171-194
Back Matter....Pages 195-245
备用描述
This book details how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. It features a case study approach that includes the design of uniaxial piezoresistors and pressure sensors
备用描述
Microsystems and Nanosystems
Erscheinungsdatum: 23.10.2013
开源日期
2013-11-01
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