Silicon Processing for the VLSI Era: Process Technology Vol. 1 🔍
Stanley Wolf, Richard N. Tauber
Lattice Press, Vol. 1, 1st, 1986
英语 [en] · PDF · 39.5MB · 1986 · 📘 非小说类图书 · 🚀/lgli/lgrs/nexusstc/zlib · Save
描述
the Second Edition Of Volume 1 Has Been Extensively Rewritten And Brougt Up To Date. Its Length Has Been Increased From 660 To Over 900 Pages. It Contains More Than 600 Illustrations, 200 Problems, And 1000 References (a Large Fraction From 1996 To 1999 Sources). It Is Written In The Same Lucid And User-friendly Style As The First Edition. The Following Hot Process Technologies Are Covered In Detail. This Book Also Has A Full Money-back Guarantee! 300 Mm Wafers chemical-mechanical Polishing (cmp) stepper-scanners copper Interconnects low-k Dielectrics chemically-amplified (ca) Resists cobalt And Titanium Salicides Phase-shift Masking (psm) high Density Plasma (hdp) Sources optical Proximity Correction (opc) Next Generation Lithography (ngl) Ionized Metal Sputtering ozone:teos Dielectric Films Thin Gate Oxides Off axis Illumination transient Enhanced Diffusion (ted) diffusion Barriers For Cu (ta, Tan, Tin) arcs (barcs, Tars) ultra-low & High-energy Ion Implantation Dual-damascene Interconnects
备用文件名
lgrsnf/F:\Library.nu\47848ded277668a131f5a6f7afb1674f~0961672161,9780961672164.pdf
备用文件名
nexusstc/Silicon Processing for the VLSI Era: Process Technology/47848ded277668a131f5a6f7afb1674f.pdf
备用文件名
zlib/Engineering/Stanley Wolf, Richard N. Tauber/Silicon Processing for the VLSI Era: Process Technology_821198.pdf
备选标题
Silicon Processing for the VLSI Era, Vol. 1: Process Technology
备选作者
Wolf, Stanley, Tauber, Richard N.
备选作者
Stanley Wolf, 1943-
备用版本
2nd ed., Sunset Beach, Calif, California, 2002
备用版本
United States, United States of America
备用版本
2nd ed, Suset Beach, California, 2000
备用版本
Sunset Beach, Calif. :, ©2000->
备用版本
2nd edition, November 1, 1999
备用版本
2nd, US, 1999
备用版本
1, 2, 1999
元数据中的注释
lg396720
元数据中的注释
{"edition":"2","isbns":["0961672161","9780961672164"],"last_page":960,"publisher":"Lattice Press","volume":"1"}
元数据中的注释
Includes bibliographies and indexes.
开源日期
2011-04-20
ISBN-13978-0-9616721-6-4
ISBN-100-9616721-6-1
OCLC43698493
OCLC53797045
OCLC637173129
AacIdaacid__gbooks_records__20240920T051416Z__8KEStXRhduTwS4sJeCHHCq
AacIdaacid__goodreads_records__20240913T115838Z__749236__hNuci64aBvHeELNhV8q3XX
AacIdaacid__isbngrp_records__20240920T194930Z__dRsu2xAXm2ySPKsS2Mji4j
AacIdaacid__nexusstc_records__20240516T162157Z__8wqTBcMppi7d5Q1x6PzMCo
AacIdaacid__worldcat__20250804T000000Z__4ZPjDkZkUWEzA7m4NwB7DZ
AacIdaacid__worldcat__20250804T000000Z__Cpjk99qeQASZUf9VPZsHJc
AacIdaacid__worldcat__20250804T000000Z__FGa6rz9gVjgNYJyytxaVPA
AacIdaacid__worldcat__20250804T000000Z__Fzm6urMTZtDi24tEH4dBvm
AacIdaacid__worldcat__20250804T000000Z__JMKiV8LRi9FWJzWEFXsUbP
AacIdaacid__worldcat__20250804T000000Z__KJ8spXqfZwZGamgckscysc
AacIdaacid__worldcat__20250804T000000Z__VknXEtvgEVDVTpakikynmo
AacIdaacid__worldcat__20250804T000000Z__Xpa4c9zenUQoHacv5k9MVC
AacIdaacid__worldcat__20250804T000000Z__b77Ue8xhmGQMAohofpnvGM
AacIdaacid__worldcat__20250804T000000Z__h2ZerCz2mZYhE65uSfxSyW
AacIdaacid__worldcat__20250804T000000Z__h5EBTtRtp957mxbDS3LwAi
AacIdaacid__worldcat__20250804T000000Z__iPBpKVy2G7HDKS94XX8svC
AacIdaacid__zlib3_records__20240809T232556Z__821198__U39QuE3KvAL9e3iSbmMNmW
AA Record IDmd5:47848ded277668a131f5a6f7afb1674f
ASIN0961672161
Collectionlgli
Collectionlgrs
Collectionnexusstc
Collectionzlib
Content Typebook_nonfiction
SHA-256889e4940
Google Books Source Scrape Date2024-09-20
Goodreads Source Scrape Date2024-09-13
ISBNdb Scrape Date2022-09-01
ISBN GRP Source Scrape Date2024-09-20
Libgen.li Source Date2011-04-20
Libgen.rs Non-Fiction Date2011-04-20
Nexus/STC Source issued_at Date1999-01-01
Nexus/STC Source Updated Date2024-05-16
OCLC Scrape Date2025-01-01
OpenLib 'created' Date2008-04-01
Z-Library Source Date2019-04-08
DDC621.381/73
Filepathlgli/F:\Library.nu\47848ded277668a131f5a6f7afb1674f~0961672161,9780961672164.pdf
Filepathlgrsnf/F:\Library.nu\47848ded277668a131f5a6f7afb1674f~0961672161,9780961672164.pdf
Filepathnexusstc/Silicon Processing for the VLSI Era: Process Technology/47848ded277668a131f5a6f7afb1674f.pdf
Filepathzlib/Engineering/Stanley Wolf, Richard N. Tauber/Silicon Processing for the VLSI Era: Process Technology_821198.pdf
Filesize39511280
Google BooksfAuKQgAACAAJ
Goodreads749236
IPFS CIDQmdxN4guWeQihEVrRi3uGq64jqR1Mfft5a5h37bAQtk7qv
IPFS CIDbafykbzacec3scktpka7s4s4s3mvglp5r7jpd4usehhpkelk2f73xz2dkhoq4c
ISBN GRP ID3bc1a6644f415b695a89261cd97b965b
Languageen
LCCTK7874 .W635 2002
LCCN2003283097
Libgen.li File91494438
Libgen.li libgen_id396720
Libgen.rs Non-Fiction396720
Libgen.rs Non-Fiction Topictechnique\\electronics: vlsi
Library Thing335404
MD547848ded277668a131f5a6f7afb1674f
Nexus/STC7ke3fig0yozag9f5qh1qiapb3
OCLC Editions5
OCLC Editions (from search_holdings_all_editions_response)5
OCLC Editions (from search_holdings_summary_all_editions)4
OCLC 'From Filename'2023_05_v4_type123/3967/396778357
OCLC 'From Filename'2023_05_v4_type123/7284/728476473
OCLC 'From Filename'search_editions_response/43698493
OCLC 'From Filename'search_holdings_summary_all_editions/43698493/index/6126774
OCLC 'From Filename'w2/v7/5785/578552889
OCLC 'From Filename'worldcat_2022_09_titles_1_backup_2022_10_12/004/0043698
OCLC 'From Filename'worldcat_2022_09_titles_1_backup_2022_10_12/005/0053797
OCLC 'From Filename'worldcat_2022_09_titles_1_backup_2022_10_12/v3/1016/101664847
OCLC 'From Filename'worldcat_2022_09_titles_1_backup_2022_10_12/v3/1274/127431743
OCLC 'From Filename'worldcat_2022_09_titles_1_backup_2022_10_12/v4/0968/96896706
Open LibraryOL14992745W
Open LibraryOL20659131W
Open LibraryOL27933879M
Open LibraryOL3708068M
Open LibraryOL4777961W
Open LibraryOL8516984M
Open Library Source Recordamazon:0961672161
Open Library Source Recordidb:9780961672164
Open Library Source Recordmarc_columbia/Columbia-extract-20221130-007.mrc:101997868:1085
Open Library Source Recordmarc_loc_2016/BooksAll.2016.part30.utf8:231927596:827
Open Library SubjectElectronics - General
Open Library SubjectEngineering - Electrical & Electronic
Open Library SubjectEtching
Open Library SubjectIntegrated circuits
Open Library SubjectIntegrated circuits -- Very large scale integration.
Open Library SubjectScience/Mathematics
Open Library SubjectSemiconductors
Open Library SubjectSemiconductors -- Etching.
Open Library SubjectSilicon
Open Library SubjectSilicon.
Open Library SubjectTechnology & Industrial Arts
Open Library SubjectVery large scale integration
Server Pathg4/libgenrs_nonfiction/libgenrs_nonfiction/396000/47848ded277668a131f5a6f7afb1674f
SHA-1dtjliwr4kqdwffgxmkanfjdlve3fhq6a
SHA-256924fa8c9aa7d2ddd95d6913a388cdff57ce2bdc7a22b7987f99c96ed4cc7620b
Torrentexternal/libgen_rs_non_fic/r_396000.torrent
Year1986
Year1999
Year2000
Year2002
Z-Library821198
Zlib Category ID13
Zlib Category NameEngineering
ISBN-13:
978-0-9616721-6-4 / 9780961672164
ISBN-10:
0-9616721-6-1 / 0961672161
代码浏览器: 在代码浏览器中查看“isbn10:0961672161”
AacId:
aacid__gbooks_records__20240920T051416Z__8KEStXRhduTwS4sJeCHHCq
Anna’s Archive Container identifier.
AacId:
aacid__goodreads_records__20240913T115838Z__749236__hNuci64aBvHeELNhV8q3XX
Anna’s Archive Container identifier.
AacId:
aacid__isbngrp_records__20240920T194930Z__dRsu2xAXm2ySPKsS2Mji4j
Anna’s Archive Container identifier.
AacId:
aacid__nexusstc_records__20240516T162157Z__8wqTBcMppi7d5Q1x6PzMCo
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__4ZPjDkZkUWEzA7m4NwB7DZ
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__Cpjk99qeQASZUf9VPZsHJc
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__FGa6rz9gVjgNYJyytxaVPA
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__Fzm6urMTZtDi24tEH4dBvm
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__JMKiV8LRi9FWJzWEFXsUbP
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__KJ8spXqfZwZGamgckscysc
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__VknXEtvgEVDVTpakikynmo
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__Xpa4c9zenUQoHacv5k9MVC
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__b77Ue8xhmGQMAohofpnvGM
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__h2ZerCz2mZYhE65uSfxSyW
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__h5EBTtRtp957mxbDS3LwAi
Anna’s Archive Container identifier.
AacId:
aacid__worldcat__20250804T000000Z__iPBpKVy2G7HDKS94XX8svC
Anna’s Archive Container identifier.
AacId:
aacid__zlib3_records__20240809T232556Z__821198__U39QuE3KvAL9e3iSbmMNmW
Anna’s Archive Container identifier.
AA Record ID:
md5:47848ded277668a131f5a6f7afb1674f
Anna’s Archive record ID.
Collection:
lgli
The collection on Anna’s Archive that provided data for this record.
URL: /datasets/lgli
网站: /datasets
代码浏览器: 在代码浏览器中查看“collection:lgli”
Collection:
lgrs
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URL: /datasets/lgrs
网站: /datasets
代码浏览器: 在代码浏览器中查看“collection:lgrs”
Collection:
nexusstc
The collection on Anna’s Archive that provided data for this record.
URL: /datasets/nexusstc
网站: /datasets
Collection:
zlib
The collection on Anna’s Archive that provided data for this record.
URL: /datasets/zlib
网站: /datasets
代码浏览器: 在代码浏览器中查看“collection:zlib”
Content Type:
book_nonfiction
Content type, determined by Anna’s Archive.
SHA-256:
889e4940
代码浏览器: 在代码浏览器中查看“crc32:889e4940”
Google Books Source Scrape Date:
2024-09-20
Date Anna’s Archive scraped the Google Books collection.
网站: /datasets/gbooks
Goodreads Source Scrape Date:
2024-09-13
Date Anna’s Archive scraped the Goodreads collection.
ISBNdb Scrape Date:
2022-09-01
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ISBN GRP Source Scrape Date:
2024-09-20
Date Anna’s Archive scraped the ISBN GRP collection.
Libgen.rs Non-Fiction Date:
2011-04-20
Date Libgen.rs Non_Fiction published this file.
网站: /datasets/lgrs
Nexus/STC Source issued_at Date:
1999-01-01
Date Nexus/STC reports in their issued_at field, which is the “issuing time of the item described by record.”
Nexus/STC Source Updated Date:
2024-05-16
Date Nexus/STC last updated this record.
OCLC Scrape Date:
2025-01-01
The date that Anna’s Archive scraped this OCLC/WorldCat record.
网站: /datasets/oclc
OpenLib 'created' Date:
2008-04-01
The 'created' metadata field on the Open Library, indicating when the first version of this record was created.
网站: /datasets/ol
Filepath:
lgli/F:\Library.nu\47848ded277668a131f5a6f7afb1674f~0961672161,9780961672164.pdf
Browse collections using their original file paths (particularly 'upload' is interesting)
Filepath:
lgrsnf/F:\Library.nu\47848ded277668a131f5a6f7afb1674f~0961672161,9780961672164.pdf
Browse collections using their original file paths (particularly 'upload' is interesting)
Filepath:
nexusstc/Silicon Processing for the VLSI Era: Process Technology/47848ded277668a131f5a6f7afb1674f.pdf
Browse collections using their original file paths (particularly 'upload' is interesting)
Filepath:
zlib/Engineering/Stanley Wolf, Richard N. Tauber/Silicon Processing for the VLSI Era: Process Technology_821198.pdf
Browse collections using their original file paths (particularly 'upload' is interesting)
Filesize:
39511280
Filesize in bytes.
Google Books:
fAuKQgAACAAJ
网站: /datasets/gbooks
IPFS CID:
QmdxN4guWeQihEVrRi3uGq64jqR1Mfft5a5h37bAQtk7qv
Content Identifier (CID) of the InterPlanetary File System (IPFS).
IPFS CID:
bafykbzacec3scktpka7s4s4s3mvglp5r7jpd4usehhpkelk2f73xz2dkhoq4c
Content Identifier (CID) of the InterPlanetary File System (IPFS).
ISBN GRP ID:
3bc1a6644f415b695a89261cd97b965b
ISBN GRP ID.
LCC:
TK7874 .W635 2002
Library of Congress Classification
Libgen.li File:
91494438
Global file ID in Libgen.li. Directly taken from the 'f_id' field in the 'files' table.
网站: /datasets/lgli
代码浏览器: 在代码浏览器中查看“lgli:91494438”
Libgen.li libgen_id:
396720
Repository ID for the 'libgen' repository in Libgen.li. Directly taken from the 'libgen_id' field in the 'files' table. Corresponds to the 'thousands folder' torrents.
网站: /datasets/lgli
Libgen.rs Non-Fiction:
396720
Repository ID for the non-fiction ('libgen') repository in Libgen.rs. Directly taken from the 'id' field in the 'updated' table. Corresponds to the 'thousands folder' torrents.
网站: /datasets/lgrs
代码浏览器: 在代码浏览器中查看“lgrsnf:396720”
Libgen.rs Non-Fiction Topic:
technique\\electronics: vlsi
Libgen’s own classification system of 'topics' for non-fiction books. Obtained from the 'topic' metadata field, using the 'topics' database table, which seems to have its roots in the Kolxo3 library that Libgen was originally based on. https://web.archive.org/web/20250303231041/https://wiki.mhut.org/content:bibliographic_data says that this field will be deprecated in favor of Dewey Decimal.
网站: /datasets/lgrs
Library Thing:
335404
MD5:
47848ded277668a131f5a6f7afb1674f
Nexus/STC:
7ke3fig0yozag9f5qh1qiapb3
ID of an individual edition of a file in Nexus/STC.
OCLC Editions:
5
Number of editions (unique OCLC IDs) reported by OCLC/WorldCat metadata. 'many' means 20 or more.
网站: /datasets/oclc
代码浏览器: 在代码浏览器中查看“oclc_editions:5”
OCLC Editions (from search_holdings_all_editions_response):
5
网站: /datasets/oclc
OCLC Editions (from search_holdings_summary_all_editions):
4
网站: /datasets/oclc
OCLC 'From Filename':
2023_05_v4_type123/3967/396778357
网站: /datasets/oclc
OCLC 'From Filename':
2023_05_v4_type123/7284/728476473
网站: /datasets/oclc
OCLC 'From Filename':
search_editions_response/43698493
网站: /datasets/oclc
OCLC 'From Filename':
search_holdings_summary_all_editions/43698493/index/6126774
网站: /datasets/oclc
OCLC 'From Filename':
w2/v7/5785/578552889
网站: /datasets/oclc
OCLC 'From Filename':
worldcat_2022_09_titles_1_backup_2022_10_12/004/0043698
网站: /datasets/oclc
OCLC 'From Filename':
worldcat_2022_09_titles_1_backup_2022_10_12/005/0053797
网站: /datasets/oclc
OCLC 'From Filename':
worldcat_2022_09_titles_1_backup_2022_10_12/v3/1016/101664847
网站: /datasets/oclc
OCLC 'From Filename':
worldcat_2022_09_titles_1_backup_2022_10_12/v3/1274/127431743
网站: /datasets/oclc
OCLC 'From Filename':
worldcat_2022_09_titles_1_backup_2022_10_12/v4/0968/96896706
网站: /datasets/oclc
Open Library:
OL14992745W
代码浏览器: 在代码浏览器中查看“ol:OL14992745W”
Open Library:
OL20659131W
代码浏览器: 在代码浏览器中查看“ol:OL20659131W”
Open Library:
OL27933879M
代码浏览器: 在代码浏览器中查看“ol:OL27933879M”
Open Library:
OL3708068M
代码浏览器: 在代码浏览器中查看“ol:OL3708068M”
Open Library:
OL4777961W
代码浏览器: 在代码浏览器中查看“ol:OL4777961W”
Open Library:
OL8516984M
代码浏览器: 在代码浏览器中查看“ol:OL8516984M”
Open Library Source Record:
amazon:0961672161
The code for a source record that Open Library imported from.
网站: /datasets/ol
Open Library Source Record:
idb:9780961672164
The code for a source record that Open Library imported from.
网站: /datasets/ol
Open Library Source Record:
marc_columbia/Columbia-extract-20221130-007.mrc:101997868:1085
The code for a source record that Open Library imported from.
URL: https://openlibrary.org/show-records/marc_columbia/Columbia-extract-20221130-007.mrc:101997868:1085
网站: /datasets/ol
Open Library Source Record:
marc_loc_2016/BooksAll.2016.part30.utf8:231927596:827
The code for a source record that Open Library imported from.
网站: /datasets/ol
Open Library Subject:
Integrated circuits -- Very large scale integration.
Tag in Open Library.
网站: /datasets/ol
Server Path:
g4/libgenrs_nonfiction/libgenrs_nonfiction/396000/47848ded277668a131f5a6f7afb1674f
Path on Anna’s Archive partner servers.
SHA-1:
dtjliwr4kqdwffgxmkanfjdlve3fhq6a
SHA-256:
924fa8c9aa7d2ddd95d6913a388cdff57ce2bdc7a22b7987f99c96ed4cc7620b
Torrent:
external/libgen_rs_non_fic/r_396000.torrent
Bulk torrent for long-term preservation.
网站: /torrents
Z-Library:
821198
ID in Z-Library.
URL: https://z-lib.gd/
网站: /datasets/zlib
代码浏览器: 在代码浏览器中查看“zlib:821198”
Zlib Category ID:
13
Category ID on the Z-Library website.
Zlib Category Name:
Engineering
Name for the zlib_category_id (category ID on the Z-Library website).
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您可以将 PDF 和 EPUB 文件发送到您的 Kindle 或 Kobo 电子阅读器。
推荐的工具:亚马逊的“发送到 Kindle”和djazz 的“发送到 Kobo/Kindle” -
支持作者和图书馆
✍️ 如果您喜欢这个并且能够负担得起,请考虑购买原版,或直接支持作者。
📚 如果您当地的图书馆有这本书,请考虑在那里免费借阅。
下面的文字仅以英文继续。
总下载量:
“文件的MD5”是根据文件内容计算出的哈希值,并且基于该内容具有相当的唯一性。我们这里索引的所有影子图书馆都主要使用MD5来标识文件。
一个文件可能会出现在多个影子图书馆中。有关我们编译的各种数据集的信息,请参见数据集页面。
有关此文件的详细信息,请查看其JSON 文件。 Live/debug JSON version. Live/debug page.